Pressure Sensors

85 Constant Voltage

• 316L SS Pressure Sensor
• Small Profile
• 0 – 100mV Output
• Absolute and Gage
• Temperature Compensated

Description

The 85 constant voltage is a small profile, media compatible, piezoresistive silicon pressure sensor packaged in a 316L stainless steel housing. The 85 constant voltage is offered in a weldable package or with a variety of threaded fittings such as 1/4 and 1/8NPT, 1/4BSP as well as custom process fittings.

The 85 constant voltage is designed for OEM applications where compatibility with corrosive media is required.
The sensing package utilizes silicon oil to transfer pressure from the 316L stainless steel diaphragm to the sensing element. A ceramic substrate is attached to the package that contains laser-trimmed resistors for temperature compensation and offset correction.

Please refer to the 85 uncompensated and compensated datasheets for more information on different features
of the 85.

316L SS Pressure Sensor High Pressure Sealed Gage, Absolute

89 Series 

The 89 series is a small profile, media compatible, piezoresistive silicon pressure sensor packaged in a 316L stainless steel housing featuring 5/16-32 UNEF threads
and can be welded in place. The 89 is designed for high pressure OEM applications where compatibility with
corrosive media is required.

The sensing package utilizes silicone oil to transfer pressure from the 316L stainless steel diaphragm to the sensing element.

Features

• Weldable and Threaded Process Fittings or O-Ring Mount
• -40ºC to +125ºC Operating Temperature Range
• ±0.25% Pressure Non Linearity
• Solid State Reliability

Applications

• Hydraulic Controls
• Process Control
• Process Calibrators
• Refrigeration/Compressors

MS4426

• PC Board Mountable Pressure Sensor
• 0-100 mV Output
• Voltage Excitation
• Gage and Absolute
• Temperature Compensated

The MS4426 is a temperature compensated, piezoresistive silicon pressure sensor packaged in a dual inline configuration and intended for cost sensitive applications where excellent performance and long-term stability are required.

PC Board Mountable Pressure Sensor Combination Temperature and Pressure Analog Output and I²C or SPI Digital Output
Gage, Differential, Absolute, Compound, Vacuum
3.3 or 5.0Vdc Supply Voltage

MS45xx Series

The MS45xx series is a small, ceramic based, PCB mounted pressure transducer using Measurement Specialties’ proprietary UltraStable™ technology (MS4525/MS4525DO) and the latest CMOS sensor conditioning circuitry. This series contains both analog output (MS4515/MS4525) and digital output (MS4515DO/MS4525DO) where the digital output versions feature either I²C or SPI interface and provide 14-bit pressure as well as 11-bit temperature sensing.

It is fully calibrated and temperature compensated with
a total error band (TEB) of less than 1.0% over the compensated range. The sensor operates from a single supply of either 3.3 or 5.0Vdc and requires a single external component for proper operation. The rugged ceramic transducer is available in side port, top port, and manifold mount and can measure pressure up to 30inH2O (MS4515/MS4515DO) and 150psi (MS4525/MS4525DO). The 1/8” barbed pressure ports mate securely with 3/32” ID tubing.

Barometric Pressure Applications

These Barometric pressure sensors are based upon a proprietary package technology to reduce errors. This model provides a fixed 4-volt output with superior
output characteristics. The sensor housing has been designed specifically to reduce package induced parasitic stress and strain. In addition the sensor utilizes a silicon, micro machined (MEMS)structure to provide a very linear output to measured pressure. The sensor embodies a vacuum reference.

These calibrated and temperature compensated sensors give an accurate and stable output over a wide temperature range. Each sensor is internally compensated using an ASIC compensation technique. This series is intended for use with non-corrosive, non-ionic working fluids such as air, dry gases and the like.

All parameters are measured at 5.0 volt excitation for ratiometric parts and 12.0 for parts with internal reference, for the nominal full scale pressure and room temperature unless otherwise specified.

SM5651/SM5652

Low Pressure, Constant Current DIP
Low Pressure, Constant Voltage DIP

LOW PRESSURE TRANSDUCER FULLY TEMPERATURE COMPENSATED AND CALIBRATED DUAL-IN-LINE PACKAGE

Description
The SM5650 Series of OEM pressure sensors are fully calibrated, temperature compensated low-pressure sensors in dual in-line packages for printed circuit board mounting. These sensors offer improved performance as well as the option for either constant current or constant voltage
excitation. Higher pressure ranges are also available (See SM5611/SM5612 Datasheet), resulting in the broadest
selection of standard pressure ranges in the industry.

Features

• Low pressure (from 0-0.15 PSI FS to 0-3.0 PSI FS)
• Constant voltage and constant current versions
• Easy to use dual in-line package (DIP)
• Wide 0-60°C compensated temperature range
• Span calibration to ±2% for low pressure
• Zero offset calibration
• High performance, stable packaged silicon chip
• Gage and differential pressure configurations

Amplified Pressure Sensor

• Now with access to digital temperature and corrected digital pressure
• Low-Cost, Fully Amplified, Calibrated, and Compensated in a single package
• Available for differential, Single-ended differential, Gage & absolute applications
• Multiple pressure ranges available to measure pressure down to 0.15 psi full-scale and up to 100 psi full-scale

Description

The Silicon Microstructures SM5812and SM5852 series of OEM pressure sensors combines state-of-the-art pressure sensor technology with CMOS digital signal processing technology to produce an amplified, fully conditioned, multi-order pressure and temperature compensated sensor in a dual in-line package (DIP) configuration.

Features

• Amplified, calibrated, fully signal conditioned output span of 4.0 VDC FS (0.5 to 4.5 V signal)
• Digital temperature and calibrated pressure available through I²C interface
• Output ratiometric with supply voltage
• Multi-order correction for pressure nonlinearity (factory programmed)
• Multi-order correction for temperature coefficient of span and offset (factory programmed)
• Gage, differential, and absolute versions
• SMI’s unique low-pressure die allows for a full-scale pressure range of 0-0.15 PSI

Signal Conditioned Ultra-Low Pressure Sensor

The Silicon Microstructrures SM5852 series of OEM pressure sensors combines state-of-the-art pressure sensor technology with CMOS mixed signal processing technology to produce an amplified, fully conditioned, multi-order pressure and temperature compensated sensor in a dual in-line package (DIP) configuration.

Highlights

• Pressure Calibrated, and Temperature Compensated Outputs
• Both Amplified Analog and 12C Digital Interface
• Dual Axial Tubes for Differential and Gauge Applications
• Rugged and Highly Stable Ceramic Dual In-line Package (DIP)
• Unique Ultra Low Pressure Die enables full scale (FS) pressure range of 0.05 PSI(1.5 in H2O)

Medium Pressure Sensor Analog Output

The SM6844 series is an absolute pressure MEMS sensor family offers state-of-the-art pressure transducer technology with CMOS mixed signal processing technology to produce an analog, fully conditioned, pressure and temperature compensated sensor in JEDEC standard SOIC-16package with a single horizontal porting option.

Features

• Analog pressure calibrated and temperature compensated output
• Amplified analog output
• Compensated temperature range: 0 to 85 0C
• Absolute pressure configuration
• Insensitive to mounting orientation

Ultra-Low Pressure Digital Sensor

The SM9541 series is a digital, low pressure MEMS sensor family offering state-of-the-art pressure transducer technology and CMOS mixed signal processing technology to produce a digital, fully conditioned, multi-order pressure and temperature compensated sensor in JEDEC standard SOIC-16 package with a dual vertical porting option.

Features

• Fully digital, pressure calibrated and temperature compensated output
• l²C digital interface
• Compensated temperature range: -5 to 65⁰C
• Compound gage and differential pressure configuration
• Insensitive to mounting orientation
• Robust JEDEC SOIC-16 package for automated assembly
• Manufactured according to ISO9001 and ISO/TS 16949 standards
• RoHS & REACH compliant
• Pressure ranges from 10cm*H2O to 140 cm*H2O (0.14 to 2 PSI)